This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems.
Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.
Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions.
40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.
1. Cover image 2. Title page 3. Table of Contents 4. Copyright 5. Preface 6. Part I: Fundamentals of Sputtering 7. 1. Thin Films and Nanomaterials 8. 2. Sputtering Phenomena 9. 3. Sputtering Systems 10. Part II: Theory and Practice: Sputtering Deposition of Functional Thin Films 11. 4. Computer Simulation 12. 4.1 Features of Sputter Deposition 13. 4.2 Roles of Sputtering Gas in Sputter Deposition 14. 4.3 Significance of Analysis of the Transport Process of Sputtered Particles Through Sputtering Gas 15. 4.4 Analysis of the Transport Process of Sputtered Particles by MC Method 16. 4.5 Applications 17. 4.6 Summary 18. References 19. 5. Basic Process of Sputtering Deposition 20. 6. Functional Thin Films 21. 6.1 ZnO Thin Films 22. 6.2 Compound Oxide Thin Films 23. 6.3 Nitrides, Carbides, Silicates, Selenides 24. 6.4 Amorphous Thin Films 25. 6.5 Miscellaneous 26. References 27. Part III: Sputtering Technology for Nanomaterials and Thin Film MEMS 28. 7. Ferroelectric Thin Films 29. 8. Thin Film MEMS 30. 9. Micro-Fabrication by Sputtering 31. Appendix 1: Fundamental Physical Constants 32. Appendix 2: Table of Conversion Factors 33. Appendix 3: Electric Units, Their Symbols and Conversion Factors 34. Postscript 35. Index
This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems.
Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.
Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions.
40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.
1. Cover image 2. Title page 3. Table of Contents 4. Copyright 5. Preface 6. Part I: Fundamentals of Sputtering 7. 1. Thin Films and Nanomaterials 8. 2. Sputtering Phenomena 9. 3. Sputtering Systems 10. Part II: Theory and Practice: Sputtering Deposition of Functional Thin Films 11. 4. Computer Simulation 12. 4.1 Features of Sputter Deposition 13. 4.2 Roles of Sputtering Gas in Sputter Deposition 14. 4.3 Significance of Analysis of the Transport Process of Sputtered Particles Through Sputtering Gas 15. 4.4 Analysis of the Transport Process of Sputtered Particles by MC Method 16. 4.5 Applications 17. 4.6 Summary 18. References 19. 5. Basic Process of Sputtering Deposition 20. 6. Functional Thin Films 21. 6.1 ZnO Thin Films 22. 6.2 Compound Oxide Thin Films 23. 6.3 Nitrides, Carbides, Silicates, Selenides 24. 6.4 Amorphous Thin Films 25. 6.5 Miscellaneous 26. References 27. Part III: Sputtering Technology for Nanomaterials and Thin Film MEMS 28. 7. Ferroelectric Thin Films 29. 8. Thin Film MEMS 30. 9. Micro-Fabrication by Sputtering 31. Appendix 1: Fundamental Physical Constants 32. Appendix 2: Table of Conversion Factors 33. Appendix 3: Electric Units, Their Symbols and Conversion Factors 34. Postscript 35. Index
